| Autor: |
Tom Hovell, Jon Petzing, Wen Guo, Connor Gill, Laura Justham, Niels Lohse, Peter Kinnell |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
|
| Zdroj: |
Metrology, Vol 3, Iss 2, Pp 139-168 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2673-8244 |
| DOI: |
10.3390/metrology3020009 |
| Popis: |
Non-destructive measurements of high aspect ratio microscale features, especially those with internal geometries such as micro-holes, remain a challenging metrology problem that is increasing in difficulty due to the increasing requirement for more complexity and higher tolerances in such structures. Additionally, there is a growing use of functional surface texturing for improving characteristics such as heat transfer and wettability. As a result, measurement techniques capable of providing dimensional form and surface finish for these features are of intense interest. This review explores the state-of-the-art inspection methodologies compatible with high-aspect-ratio structures and their suitability for extracting three-dimensional surface data based on identified high-aspect ratio structure types. Here, the abilities, limitations, challenges, and future requirements for the practical implementation and acceptance of these measurement techniques are presented. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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