Silicon Radiation Detector Technologies: From Planar to 3D

Autor: Gian-Franco Dalla Betta, Jixing Ye
Jazyk: angličtina
Rok vydání: 2023
Předmět:
Zdroj: Chips, Vol 2, Iss 2, Pp 83-101 (2023)
Druh dokumentu: article
ISSN: 2674-0729
DOI: 10.3390/chips2020006
Popis: Silicon radiation detectors, a special type of microelectronic sensor which plays a crucial role in many applications, are reviewed in this paper, focusing on fabrication aspects. After addressing the basic concepts and the main requirements, the evolution of detector technologies is discussed, which has been mainly driven by the ever-increasing demands for frontier scientific experiments.
Databáze: Directory of Open Access Journals