| Autor: |
Claudia Diletto, Fiorita Nunziata, Salvatore Aprano, Ludovico Migliaccio, Maria Grazia Maglione, Alfredo Rubino, Paolo Tassini |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Crystals, Vol 14, Iss 9, p 776 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2073-4352 |
| DOI: |
10.3390/cryst14090776 |
| Popis: |
Indium tin oxide (ITO) is a transparent conductive oxide (TCO) commonly used in the realization of optoelectronic devices needing at least a transparent electrode. In this work, ITO thin films were deposited on glass substrates by non-reactive RF magnetron sputtering, investigating the effects of power density, sputtering pressure, and substrate temperature on the electrical, optical, and structural properties of the as-grown films. High-quality films, in terms of crystallinity, transparency, and conductivity were obtained. The 120 nm thick ITO films grown at 225 °C under an argon pressure of 6.9 mbar and a sputtering power density of 2.19 W/cm2 without post-annealing treatments in an oxidizing environment showed an optical transmittance near 90% at 550 nm and a resistivity of 2.10×10−4 Ω cm. This material was applied as the electrode of simple-structure organic light-emitting diodes (OLEDs). |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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