| Autor: |
Oji Matsumoto, Kenta Miura, Haruna Kawaguchi, Mizuki Sano, Masaki Saito, Yoshiyuki Hirano, Wataru Kada, Osamu Hanaizumi |
| Jazyk: |
angličtina |
| Rok vydání: |
2017 |
| Předmět: |
|
| Zdroj: |
Results in Physics, Vol 7, Iss , Pp 2965-2967 (2017) |
| Druh dokumentu: |
article |
| ISSN: |
2211-3797 |
| DOI: |
10.1016/j.rinp.2017.07.075 |
| Popis: |
This article presents the first demonstration of integrating a simple one-dimensional (1-D) periodic microstructure and a light-emitting zinc oxide (ZnO) thin film on a silicon (Si) substrate using a simple process with two-beam interference lithography and sputtering. A 1-D microstructure composed of ZnO was obtained using our fabrication process without using a photomask and dry etching. The intensity of a photoluminescence (PL) peak observed from a sample with the periodic microstructure was approximately 5.3 times stronger than that without it. The light-extraction efficiency from the ZnO thin film seems to be improved by the integration of the 1-D periodic microstructure. Keywords: ZnO/Si, Luminescence, Periodic microstructure, Light-extraction efficiency, Sputtering, Two-beam interference lithography |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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