Studi Penumbuhan Film Tipis Ti1-xCoxO2 dengan Teknik MOCVD Menggunakan Prekursor Titanium (IV) Isopropoxide dan Tris (2,2,6,6-tetramethyl-3, 5-heptanedionato) Cobalt (III)
| Autor: | Horasdia Saragih, Edy Supriyanto, Pepen Arifin, Mohammad Barmawi |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: | |
| Zdroj: | Journal of Mathematical and Fundamental Sciences, Vol 38, Iss 2 (2013) |
| Druh dokumentu: | article |
| ISSN: | 2337-5760 2338-5510 |
| DOI: | 10.5614/itbj.sci.2006.38.2.3 |
| Popis: | The Ti1-xCoxO2 thin films have been grown by MOCVD technique using titanium (IV) isopropoxide (TTIP) and tris (2,2,6,6-tetramethyl-3, 5-heptanedionato) Cobalt (III) [Co(TMHD)3] powder precursors. The tetrahydrofuran (THF) were used as a solvent to get a Co(TMHD)3 solution. Characteristics of precursor and growth parameters were investigated. The Co concentration in thin films were varied. The room temperature ferromagnetic properties of Ti1-xCoxO2 thin films were obtained. Solubility of Co atom in TiO2 lattice were found at about 11%. The surface morphology of films are homogen and relatively smooth. |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
|