| Popis: |
Optical interferometric sensors have acquired significant importance in metrology and information technology, especially in terms of their potential application in launching size, selectivity, sensitivity, resolution, spectral tuning ranges, efficiency, and cost. However, these demands are often contradictory and counteract one another, and are thus difficult to simultaneously fulfill during their interaction. This review focuses on a detailed comparison of seven different strongly miniaturized sensor concepts investigating the limits of these demands. For the visible and near-infrared spectral range, seven optical sensors were reviewed based on the following methodologies: classical optical transmission and reflection gratings, arrayed waveguide gratings, static Fabry–Pérot (FP) filter arrays, MEMS tunable FP interferometers, MEMS tunable photonic crystals, plasmonic filters, and fiber tip sensors. The comparison between the selected concepts concentrates on (i) the minimum space required for a particular spectral range, (ii) resolution, (iii) the integration in optical fiber technology, (iv) tunability to save space, (v) efficiency in using available light, (vi) multiplexing, (vii) miniaturization limits, and (viii) the potential of nanoimprint for cost reduction. Technologies for enhancing efficiency to obtain more available light and their applicability to the different methodologies were studied. |
