Nanocomposite‐Seeded Epitaxial Growth of Single‐Domain Lithium Niobate Thin Films for Surface Acoustic Wave Devices

Autor: Robynne L. Paldi, Zhimin Qi, Shikhar Misra, Juanjuan Lu, Xing Sun, Xin Li Phuah, Matias Kalaswad, Jay Bischoff, Darren W. Branch, Aleem Siddiqui, Haiyan Wang
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Advanced Photonics Research, Vol 2, Iss 6, Pp n/a-n/a (2021)
Druh dokumentu: article
ISSN: 2699-9293
DOI: 10.1002/adpr.202000149
Popis: Epitaxial lithium niobate (LNO) thin films are an attractive material for devices across a broad range of fields, including optics, acoustics, and electronics. These applications demand high‐quality thin films without in‐plane growth domains to reduce the optical/acoustical losses and optimize efficiency. Twin‐free single‐domain‐like growth has been achieved previously, but it requires specific growth conditions that might be hard to replicate. In this work, a versatile nanocomposite‐seeded approach is demonstrated as an effective approach to grow single‐domain epitaxial lithium niobate thin films. Films are grown through a pulsed laser deposition method and growth conditions are optimized to achieve high‐quality epitaxial film. A comprehensive microstructure characterization is performed and optical properties are measured. A piezoelectric acoustic resonator device is developed to demonstrate the future potential of the nanocomposite‐seeded approach for high‐quality LNO growth for radio frequency (RF) applications.
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