Integrated nano-opto-electro-mechanical sensor for spectrometry and nanometrology

Autor: Žarko Zobenica, Rob W. van der Heijden, Maurangelo Petruzzella, Francesco Pagliano, Rick Leijssen, Tian Xia, Leonardo Midolo, Michele Cotrufo, YongJin Cho, Frank W. M. van Otten, Ewold Verhagen, Andrea Fiore
Jazyk: angličtina
Rok vydání: 2017
Předmět:
Zdroj: Nature Communications, Vol 8, Iss 1, Pp 1-8 (2017)
Druh dokumentu: article
ISSN: 2041-1723
DOI: 10.1038/s41467-017-02392-5
Popis: Fully integratable spectrometers have trade-offs between size and resolution. Here, the authors present a nano-opto-electro-mechanical system where the functionalities of transduction, actuation and detection are fully integrated, resulting in an ultra-compact high-resolution spectrometer with a micrometer-scale footprint.
Databáze: Directory of Open Access Journals