| Autor: |
Maik Bertke, Jiushuai Xu, Michael Fahrbach, Andi Setiono, Gerry Hamdana, Hutomo Suryo Wasisto, Erwin Peiner |
| Jazyk: |
angličtina |
| Rok vydání: |
2018 |
| Předmět: |
|
| Zdroj: |
Proceedings, Vol 2, Iss 13, p 879 (2018) |
| Druh dokumentu: |
article |
| ISSN: |
2504-3900 |
| DOI: |
10.3390/proceedings2130879 |
| Popis: |
In this paper, a self-out-readable, miniaturized cantilever resonator for highly sensitiveairborne nanoparticle (NP) detection is presented. The cantilever, which is operated in thefundamental in-plane resonance mode, is used as a microbalance with femtogram resolution. Toachieve a maximum measurement signal of the piezo resistive Wheatstone half-bridge, thegeometric parameters of the sensor design were optimized by finite element modelling (FEM).Struts at the sides of the cantilever resonator act as piezo resistors and enable an electrical read-outof the phase information of the cantilever movement whereby they do not contribute to theresonators rest mass. For the optimized design, a resonator mass of 0.93 ng, a resonance frequencyof ~440 kHz, and thus a theoretical sensitivity of 4.23 fg/Hz can be achieved. A μ-channel guiding aparticle-laden air flow towards the cantilever is integrated into the sensor chip. Electrically chargedNPs will be collected by an electrostatic field between the cantilever and a counter-electrode at theedges of the μ-channel. Such μ-channels will also be used to accomplish particle separation for sizeselectiveNP detection. Throughout, the presented airborne NP sensor is expected to demonstratesignificant improvements in the field of handheld, MEMS-based NP monitoring devices. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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