| Autor: |
N Joudi, R Asadi, P Heydari, M Ganji |
| Jazyk: |
English<br />Persian |
| Rok vydání: |
2016 |
| Předmět: |
|
| Zdroj: |
Iranian Journal of Physics Research, Vol 16, Iss 1, Pp 45-53 (2016) |
| Druh dokumentu: |
article |
| ISSN: |
1682-6957 |
| Popis: |
In this paper a novel optical pressure and acceleration sensor based on micro electro mechanical systems (MEOMS) has been designed. For this purpose an integrated Mach- Zander interferometer has been used in LiNbO3 diaphragm. In this sensor, the strain caused by applied pressure or acceleration leads to a change in refractive index of the wave guide in the diaphragm due to the photoelastic effect. The refractive index change leads to a phase change in the light wave that propagates in the waveguide. This phase change is converted to intensity change using the Mach- Zander interferometer. The software ANSYS 14.5 was used for calculation of the strain in the diaphragm. The pressure and acceleration sensitivity of the designed sensor have been obtained 2.33×10-4 (rad /Pa) and 2.16×10-5 (rad.s2/m), respectively. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
|
