| Autor: |
Patrick Wiegand, Sebastian Simmich, Fatih Ilgaz, Franz Faupel, Benjamin Spetzler, Robert Rieger |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
IEEE Open Journal of Circuits and Systems, Vol 5, Pp 398-407 (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2644-1225 |
| DOI: |
10.1109/OJCAS.2024.3472124 |
| Popis: |
An application specific integrated circuit (ASIC) and a custom-made microelectromechanical system (MEMS) sensor are presented, designed to function together as a sensor system for measuring low amplitude low frequency magnetic fields. The MEMS system comprises several free-standing double-wing magnetoelectric resonators with a size of $900~\mu $ m x $150~\mu $ m to measure alternating magnetic fields in the sub-kilohertz regime. It utilizes piezolelectric (AlN) and magnetostrictive (FeCoSiB) layers to exploit the delta-E effect for magnetic field sensing. On the ASIC a three-channel current-reuse amplifier with lateral bipolar transistors in the input stage is implemented occupying a chip area of 0.0864 mm2. Measurements demonstrate a voltage gain of 40 dB with a 3-dB bandwidth of 75 kHz and an input referred noise floor of 8 nV/ $\surd $ Hz while consuming $199~\mu $ W per channel. The sensor system is capable of detecting magnetic fields with a limit of detection (LOD) of 16 nT/ $\surd $ Hz for single sensor elements. By operating three sensor elements in parallel, one on each amplifier channel, the LOD is further reduced to 10 nT/ $\surd $ Hz. Owing to the high reproducibility of the sensor elements, this improvement in the LOD is close to the ideal value of $\surd 3$ . The results imply that the system can be scaled to large numbers of sensor elements without principle obstacles. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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