Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy

Autor:	Cuberes MT, Hidalgo JA, Montero-Ocampo C
Jazyk:	angličtina
Rok vydání:	2009
Předmět:	PVD nanostructured coatings TiN Ultrasonic force microscopy Scanning probe microscopy Nanomechanics Materials of engineering and construction. Mechanics of materials TA401-492
Zdroj:	Nanoscale Research Letters, Vol 4, Iss 12, Pp 1493-1501 (2009)
Druh dokumentu:	article
ISSN:	1931-7573 1556-276X
DOI:	10.1007/s11671-009-9426-3
Popis:	Abstract Ultrasonic force microscopy has been applied to the characterization of titanium nitride coatings deposited by physical vapor deposition dc magnetron sputtering on stainless steel substrates. The titanium nitride layers exhibit a rich variety of elastic contrast in the ultrasonic force microscopy images. Nanoscale inhomogeneities in stiffness on the titanium nitride films have been attributed to softer substoichiometric titanium nitride species and/or trapped subsurface gas. The results show that increasing the sputtering power at the Ti cathode increases the elastic homogeneity of the titanium nitride layers on the nanometer scale. Ultrasonic force microscopy elastic mapping on titanium nitride layers demonstrates the capability of the technique to provide information of high value for the engineering of improved coatings.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/7955a6bc426e4fb9a082a7c054792609 Zobrazit plný text záznamu Full text from SpringerLink View record in DOAJ