Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
| Autor: | Arti Tibrewala, Norbert Hofmann, Anurak Phataralaoha, Gerd Jäger, Stephanus Büttgenbach |
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| Jazyk: | angličtina |
| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Sensors, Vol 9, Iss 5, Pp 3228-3239 (2009) |
| Druh dokumentu: | article |
| ISSN: | 90503228 1424-8220 |
| DOI: | 10.3390/s90503228 |
| Popis: | In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor. |
| Databáze: | Directory of Open Access Journals |
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