| Autor: |
Yoshinori Takei, Souichi Telada, Hajime Yoshida, Youichi Bitou, Tokihiko Kobata |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
Measurement: Sensors, Vol 22, Iss , Pp 100371- (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2665-9174 |
| DOI: |
10.1016/j.measen.2022.100371 |
| Popis: |
Optical pressure standards (OPS) using Fabry-Perot (FP) cavities can measure a wide pressure range with high accuracy. National metrology institute of Japan (NMIJ) is developing an OPS for the pressure range of 1 Pa–100 kPa. In this study, the target uncertainty of the OPS, the challenges for measuring below 100 Pa, and its current specifications in the range from 10 Pa to 120 kPa are reported. In addition, the methods for solving the challenges to achieve the target uncertainty is considered. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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