Frequency Noise Properties of Lasers for Interferometry in Nanometrology

Autor: Ondřej Číp, Jan Hrabina, Miroslava Holá, Josef Lazar
Jazyk: angličtina
Rok vydání: 2013
Předmět:
Zdroj: Sensors, Vol 13, Iss 2, Pp 2206-2219 (2013)
Druh dokumentu: article
ISSN: 1424-8220
DOI: 10.3390/s130202206
Popis: In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measurement is discussed in the context of other sources of uncertainty associated with the interferometric setup, such as, mechanics, resolution of analog-to-digital conversion, frequency bandwidth of the detection chain, and variations of the refractive index of air.
Databáze: Directory of Open Access Journals