Microlens Fabrication by Replica Molding of Electro-Hydrodynamic Printing Liquid Mold

Autor: Feiyu Fang, Xulei Tao, Xun Chen, Han Wang, Peixuan Wu, Jiarong Zhang, Jun Zeng, Zimin Zhu, Zhen Liu
Jazyk: angličtina
Rok vydání: 2020
Předmět:
Zdroj: Micromachines, Vol 11, Iss 2, p 161 (2020)
Druh dokumentu: article
ISSN: 2072-666X
DOI: 10.3390/mi11020161
Popis: In this paper, we synergistically combine electrohydrodynamic (EHD) printing and replica molding for the fabrication of microlenses. Glycerol solution microdroplets was sprayed onto the ITO glass to form liquid mold by an EHD printing process. The liquid mold is used as a master to fabricate a polydimethylsiloxane (PDMS) mold. Finally, the desired micro-optical device can be fabricated on any substrate using a PDMS soft lithography mold. We demonstrate our strategy by generating microlenses of photocurable polymers and by characterizing their optical properties. It is a new method to rapidly and cost-effectively fabricate molds with small diameters by exploiting the advantages of EHD printing, while maintaining the parallel nature of soft-lithography.
Databáze: Directory of Open Access Journals