| Autor: |
Barna1 A., Földes I. B., Bohus J., Szatmári S. |
| Jazyk: |
angličtina |
| Rok vydání: |
2015 |
| Předmět: |
|
| Zdroj: |
Metrology and Measurement Systems, Vol 22, Iss 1, Pp 165-172 (2015) |
| Druh dokumentu: |
article |
| ISSN: |
2300-1941 |
| DOI: |
10.1515/mms-2015-0014 |
| Popis: |
An active beam-pointing stabilization system has been developed for a high-power KrF laser system to eliminate the long-term drift of the directional change of the beam in order to have a stable focusing to a high intensity. The control of the beam direction was achieved by a motor-driven mirror activated by an electric signal obtained by monitoring the position of the focus of the output beam. Instead of large sized UV-sensitive position sensitive detectors a simple arrangement with scatter plates and photodiodes are used to measure the directionality of the beam. After the beam stabilization the long-term residual deviation of the laser shots is ~14 μrad, which is comparable to the shot-to-shot variation of the beam (~12 μrad). This deviation is small enough to keep the focal spot size in a micrometer range when tightly focusing the beam using off-axis parabolic mirrors. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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