Simulation of SAW Sensors with Various Distributed Mass Loadings Using Two-Dimensional Coupling-of-Modes Theory

Autor:	Ran You, Jiuling Liu, Minghua Liu, Zhiyuan Chen, Shitang He
Jazyk:	angličtina
Rok vydání:	2020
Předmět:	SAW sensors non-uniform load 2-D COM theory finite element method (FEM) transverse modes Chemical technology TP1-1185
Zdroj:	Sensors, Vol 20, Iss 24, p 7260 (2020)
Druh dokumentu:	article
ISSN:	1424-8220 73607169
DOI:	10.3390/s20247260
Popis:	In order to accurately investigate the disturbance of complex distributed mass loading on surface acoustic wave (SAW) propagation characteristics, two-dimensional coupling-of-modes (2-D COM) theory and finite element method (FEM) were used to simulate the responses of SAW sensors. By using the PDE mode of FEM software, four SAW resonators with the loads in different distribution patterns were modeled. Also, we fabricated and measured a series of SAW resonators accordingly. The results showed that the 2-D COM theory combined with the finite element method was able to simulate the transverse modes of the device and the disturbance of the mass loading on the transverse mode effectively, making the simulation more accurate.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/d73607169df141f8b094a970bef66be9 Zobrazit plný text záznamu View record in DOAJ Plný text ve formátu PDF Plný text ve formátu HTML
Nepřihlášeným uživatelům se plný text nezobrazuje	K zobrazení výsledku je třeba se přihlásit.