| Autor: |
Erik Hagen Waller, Georg von Freymann |
| Jazyk: |
angličtina |
| Rok vydání: |
2016 |
| Předmět: |
|
| Zdroj: |
Polymers, Vol 8, Iss 8, p 297 (2016) |
| Druh dokumentu: |
article |
| ISSN: |
2073-4360 |
| DOI: |
10.3390/polym8080297 |
| Popis: |
One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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