POROUS ANODISATION OF ALUMINUM FILMS WITH PHOTOLITOGRAPHIC MASK UNDER HIGH FORMING VOLTAGES

Autor: S. K. Lazarouk
Jazyk: ruština
Rok vydání: 2019
Předmět:
Zdroj: Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki, Vol 0, Iss 3, Pp 52-57 (2019)
Druh dokumentu: article
ISSN: 1729-7648
Popis: The approach of aluminium porous anodisation has been proposed. Anodisation was realized under high forming voltages with Joule heat sink through aluminium tracks formed by a photolithographic mask. Record high forming voltages have been achieved leads to new tubular oxide structure with wide outer diameter of 50 - 400 nm and the high anodic process anisotropy up to 0,8. The results obtained can be explained by imposing the high electric field in the porous alumina barrier layer.
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