| Autor: |
Alexey A. Vasiliev, Vitaliy P. Kim, Sergey V. Tkachev, Denis Yu. Kornilov, Sergey P. Gubin, Ivan S. Vlasov, Igor E. Jahatspanian, Alexy S. Sizov |
| Jazyk: |
angličtina |
| Rok vydání: |
2018 |
| Předmět: |
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| Zdroj: |
Proceedings, Vol 2, Iss 13, p 738 (2018) |
| Druh dokumentu: |
article |
| ISSN: |
2504-3900 |
| DOI: |
10.3390/proceedings2130738 |
| Popis: |
We prepared platinum nanoparticle ink usable for the fabrication of MEMS microheatersof high-temperature gas sensors and thermoresistors operating up to 450 °C and present somepreliminary results on the application of the ink in sensor microheater manufacturing. The inkconsists of platinum particles (3⁻8 nm) suspended in ethylene glycol solution of polyvinylpyrrolidone.The ink is usable in both InkJet and AerosolJet printers. The annealing at temperature of about 600 °Cleads to the formation of uniform microheater structure. The experiments on microheater agingconfirm the stability of the printed microstructure at 450 °C for at least one year of operation. Thesubstrates used for printing were thin alumina and LTCC ceramics with thickness of 12⁻20 μm. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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