Ultra-wideband Waveguide-coupled Photodiodes Heterogeneously Integrated on a Thin-film Lithium Niobate Platform

Autor: Chao Wei, Youren Yu, Ziyun Wang, Lin Jiang, Zhongming Zeng, Jia Ye, Xihua Zou, Wei Pan, Xiaojun Xie, Lianshan Yan
Jazyk: angličtina
Rok vydání: 2023
Předmět:
Zdroj: Light: Advanced Manufacturing, Vol 4, Iss 3, Pp 263-271 (2023)
Druh dokumentu: article
ISSN: 2689-9620
DOI: 10.37188/lam.2023.030
Popis: With the advantages of large electro-optical coefficient, wide transparency window, and strong optical confinement, thin-film lithium niobate (TFLN) technique has enabled the development of various high-performance optoelectronics devices, ranging from the ultra-wideband electro-optic modulators to the high-efficient quantum sources. However, the TFLN platform does not natively promise lasers and photodiodes. This study presents an InP/InGaAs modified uni-traveling carrier (MUTC) photodiodes heterogeneously integrated on the TFLN platform with a record-high 3-dB bandwidth of 110 GHz and a responsivity of 0.4 A/W at a 1,550-nm wavelength. It is implemented in a wafer-level TFLN-InP heterogeneous integration platform and is suitable for the large-scale, multi-function, and high-performance TFLN photonic integrated circuits.
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