Supercontinuum generation in ICP-CVD silicon-rich silicon nitride waveguides

Autor: Jayantha Ayesha, Andrieux Aurore, Gallet Isabelle, Finot Christophe, Hammani Kamal
Jazyk: angličtina
Rok vydání: 2023
Předmět:
Zdroj: EPJ Web of Conferences, Vol 287, p 01001 (2023)
Druh dokumentu: article
ISSN: 2100-014X
DOI: 10.1051/epjconf/202328701001
Popis: Inductively coupled plasma chemical vapor deposition was used to obtain thin films of siliconrich silicon nitride with a refractive index of 2.44 at optical telecommunications wavelength. The resulting layer was patterned into a 1.6 μm wide waveguide and tested for its nonlinear behavior using a 90-fs all-fiber laser centered at 1630 nm. A significant spectral broadening is demonstrated with a supercontinuum generation from 1300 nm to 1985 nm. Simulations are in fair agreement with the experiments, assuming a nonlinear index of 2 x 10-18 m2/W.
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