Nonconventional Tether Structure for Quality Factor Enhancement of Thin-Film-Piezoelectric-on-Si MEMS Resonator

Autor: Mohammed Awad, Temesgen Bailie Workie, Jingfu Bao, Ken-ya Hashimoto
Jazyk: angličtina
Rok vydání: 2023
Předmět:
Zdroj: Micromachines, Vol 14, Iss 10, p 1965 (2023)
Druh dokumentu: article
ISSN: 2072-666X
DOI: 10.3390/mi14101965
Popis: This article presents a new design of supporting tethers through the concept of force distribution. The transmitted force applied on tethers will be distributed on the new tether design area, resulting in low acoustic energy transferred to anchor boundaries and stored energy enhancement. This technique achieves an anchor quality factor of 175,000 compared to 58,000 obtained from the conventional tether design, representing a three-fold enhancement. Furthermore, the unloaded quality factor of the proposed design improved from 23,750 to 27,442, representing a 1.2-fold improvement.
Databáze: Directory of Open Access Journals