Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

Autor:	Attilio Frangi, Andrea Guerrieri, Nicoló Boni
Jazyk:	angličtina
Rok vydání:	2017
Předmět:	micromirrors MOEMS Mathieu equation parametric resonance continuation approach arc length algorithm material derivative comb-fingers electrostatic force and torque electrostatic stiffness Chemical technology TP1-1185
Zdroj:	Sensors, Vol 17, Iss 4, p 779 (2017)
Druh dokumentu:	article
ISSN:	1424-8220 17040779
DOI:	10.3390/s17040779
Popis:	Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/6c653965261343ea8a88cfe242b750c1 Zobrazit plný text záznamu View record in DOAJ Plný text ve formátu PDF