Analytical model establishment and attitude calculation of a parallel leaf-spring carrying mechanism
| Autor: | P. Li, Z.-R. Tong, W.-H. Zhang |
|---|---|
| Jazyk: | angličtina |
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Mechanical Sciences, Vol 13, Pp 311-320 (2022) |
| Druh dokumentu: | article |
| ISSN: | 2191-9151 2191-916X |
| DOI: | 10.5194/ms-13-311-2022 |
| Popis: | In this paper, a novel parallel leaf-spring carrying mechanism (PLCM) is investigated using a compliance-matrix-based approach. For the analytical modeling and attitude calculation, the geometric errors of the flexible arm, including the height and the top plane's direction, are considered, and the displacement method is used to calculate the equilibrium attitude. The influence of the equilibrium attitude at different heights and the initial tilts of the top planes are analyzed separately. The validity and effectiveness of the attitude calculation are illustrated by experimental verification. The laser triangulation coordinate method is used for attitude measurement. The deviations of the normal vector between the calculation results and measurement results are smaller than 2×10-4, which is small enough to satisfy practical requirements. This can be used to guarantee stable and accurate wafer transfer in a lithography machine. Therefore, it can be concluded that the methods employed for analytical model establishment and attitude calculation can be used as a reference for the analysis and design of a complex parallel compliant mechanism. |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
|