Laser micro-fabrication of concave, low-roughness features in silica

Autor: D. Hunger, C. Deutsch, R. J. Barbour, R. J. Warburton, J. Reichel
Jazyk: angličtina
Rok vydání: 2012
Předmět:
Zdroj: AIP Advances, Vol 2, Iss 1, Pp 012119-012119-6 (2012)
Druh dokumentu: article
ISSN: 2158-3226
DOI: 10.1063/1.3679721
Popis: We describe a micro-fabrication method to create concave features with ultra-low roughness in silica, either on optical fibers or on flat substrates. The machining uses a single CO2 laser pulse train. Parameters are chosen such that evaporation removes material while a low-viscosity melt layer produces excellent surface quality. A surface roughness σ ∼ 0.2 nm is regularly obtained. The concave depressions are near-spherical close to the center with radii of curvature between 20 and 2000 μm. The method allows fabrication of low-scatter micro-optical devices such as mirror substrates for high-finesse cavities or negative lenses on fiber tips, extending the range of micro-optical components.
Databáze: Directory of Open Access Journals