Quality Aspects in Production of Electronic Grade Chemicals in Multipurpose Plants

Autor: Xenia Beyrich-Graf, Guy Seltensperger
Jazyk: German<br />English<br />French
Rok vydání: 2018
Předmět:
Zdroj: CHIMIA, Vol 72, Iss 3 (2018)
Druh dokumentu: article
ISSN: 0009-4293
2673-2424
DOI: 10.2533/chimia.2018.130
Popis: Electronic devices and displays require electronic grade chemicals for their manufacturing process. As miniaturisation in the electronics industry has pushed the boundaries of physics, no contamination can be tolerated in the production of microchips or display panels. Electronic grade chemicals need to be of highest purity and quality consistency. After giving an introduction to the quality requirements in the electronics industry, this article describes the path from laboratory synthesis to a capable production process of a small volume electronic specialty material in a multipurpose plant. The upscaling of an electronic chemical for electronic device manufacturing is one of the examples of how products with high quality requirements can be successfully produced in an existing production infrastructure.
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