| Autor: |
Daehun Lee, Shahin Jahanbani, Jack Kramer, Ruochen Lu, Keji Lai |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
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| Zdroj: |
Nature Communications, Vol 14, Iss 1, Pp 1-7 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2041-1723 |
| DOI: |
10.1038/s41467-023-36936-9 |
| Popis: |
Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement sensitivity of 10 fm/√Hz. Individual overtones, spurious modes, and acoustic leakage are also visualized and analyzed. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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Full text from SpringerLink