Si-Doped HfO2-Based Ferroelectric Tunnel Junctions with a Composite Energy Barrier for Non-Volatile Memory Applications

Autor: Yoseop Lee, Sungmun Song, Woori Ham, Seung-Eon Ahn
Jazyk: angličtina
Rok vydání: 2022
Předmět:
Zdroj: Materials, Vol 15, Iss 6, p 2251 (2022)
Druh dokumentu: article
ISSN: 1996-1944
DOI: 10.3390/ma15062251
Popis: Ferroelectric tunnel junctions (FTJs) have attracted attention as devices for advanced memory applications owing to their high operating speed, low operating energy, and excellent scalability. In particular, hafnia ferroelectric materials are very promising because of their high remanent polarization (below 10 nm) and high compatibility with complementary metal-oxide-semiconductor (CMOS) processes. In this study, a Si-doped HfO2-based FTJ device with a metal-ferroelectric-insulator-semiconductor (MFIS) structure was proposed to maximize the tunneling electro-resistance (TER) effect. The potential barrier modulation effect under applied varying voltage was analyzed, and the possibility of its application as a non-volatile memory device was presented through stability assessments such as endurance and retention tests.
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