Effects of the atmosphere and substrate on the crystallization of PLZT thin films

Autor: A.Z. Simões, A.H.M. Gonzalez, M.A. Zaghete, J.A. Varela, B.D. Stojanovic
Jazyk: angličtina
Rok vydání: 2000
Předmět:
Zdroj: Materials Research, Vol 3, Iss 3, Pp 68-73 (2000)
Druh dokumentu: article
ISSN: 1516-1439
DOI: 10.1590/S1516-14392000000300004
Popis: Lead lanthanum zirconate titanate [PLZT (9/65/35)] thin films were prepared by dip-coating on Si (100) or Si/Ti/Pt (100) substrates using a polymeric precursor solution and annealed at 650 °C for 3 h. Perovskite phase formation of the PLZT thin films and microstructure were analysed using XRD and SEM. Effects of Si (100), Si/Ti/Pt (100) substrates and atmosphere on crystallization of PLZT thin films were studied. Films deposited on platinum coated silicon (100) show a heterogeneous surface with presence of bubbles. Otherwise, the PLZT (9/65/35) thin films deposited on silicon (100) substrate shows a more uniform surface after annealing in oxygen atmosphere.
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