Development of a fully automated desktop chemical vapor deposition system for programmable and controlled carbon nanotube growth

Autor: Ju Hyun Ahn, Minho Na, Sungkwan Koo, Hyunsoo Chun, Inhwan Kim, Jong Won Hur, Jae Hyuk Lee, Jong G. Ok
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: Micro and Nano Systems Letters, Vol 7, Iss 1, Pp 1-8 (2019)
Druh dokumentu: article
ISSN: 2213-9621
DOI: 10.1186/s40486-019-0091-8
Popis: Abstract We have rationally designed and developed a fully automated desktop furnace system that enables programmable chemical vapour deposition growth of carbon nanotubes with controlled height, density, and pattern architecture. Comprising several essential components involving a heating furnace, mass flowmeters, and computer controller, the developed system realizes controlled and practical carbon nanotube growth without resort to expensive and ponderous instruments. By programming, modifying, and loading the reusable recipes in the developed system, systematic and reproducible growths of carbon nanotubes with desired morphology and dimension can be performed. Growth results with controlled height, density, and pattern are demonstrated through the actual operations, confirming the validity and usefulness of the developed system towards various practical applications.
Databáze: Directory of Open Access Journals