Dominant factor on fracture strength of thin film comprising of copper helical nano-elements grown by glancing angle deposition

Autor: Takashi SUMIGAWA, Emi KAWAI, Tomoya MARUMO, Hisashi TANIE, Takayuki KITAMURA
Jazyk: japonština
Rok vydání: 2015
Předmět:
Zdroj: Nihon Kikai Gakkai ronbunshu, Vol 81, Iss 831, Pp 15-00446-15-00446 (2015)
Druh dokumentu: article
ISSN: 2187-9761
DOI: 10.1299/transjsme.15-00446
Popis: The purpose of this study is to investigate the dominant factor on the fracture strength of thin film comprising of copper (Cu) helical nano-elements, which are grown by the glancing angle deposition technique. By changing the deposition angle in the GLAD, three types of thin films with different number density of Cu helical nano-elements are produced. Crack initiation experiments are carried out using cantilever specimens where the thin film is constrained by a substrate and a stainless cantilever. Near the edge of thin film, the critical forces applied to Cu helical nano-elements at the fracture are mostly consistent regardless of the number density of nano-elements although the critical average stresses are different. This result signifies that the fracture of the thin film is governed by the strength of nano-element.
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