| Autor: |
Geraint P. Gough, Angela D. Sobiesierski, Saleem Shabbir, Stuart Thomas, Daryl M. Beggs, Robert A. Taylor, Anthony J. Bennett |
| Jazyk: |
angličtina |
| Rok vydání: |
2020 |
| Předmět: |
|
| Zdroj: |
AIP Advances, Vol 10, Iss 5, Pp 055319-055319-4 (2020) |
| Druh dokumentu: |
article |
| ISSN: |
2158-3226 |
| DOI: |
10.1063/5.0007947 |
| Popis: |
We have developed an inductively coupled plasma etching technique using a Faraday cage to create suspended gallium-nitride devices in a single step. The angle of the Faraday cage, gas mix, and chamber condition define the angle of the etch and the cross-sectional profile, which can feature undercut angles of up to 45°. We fabricate singly- and doubly-clamped cantilevers of a triangular cross section and show that they can support single optical modes in the telecom C-band. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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