| Autor: |
Le Gall Cécile, Bellanger Cindy, Primot Jérôme, Jaeck Julien |
| Jazyk: |
angličtina |
| Rok vydání: |
2023 |
| Předmět: |
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| Zdroj: |
EPJ Web of Conferences, Vol 287, p 04008 (2023) |
| Druh dokumentu: |
article |
| ISSN: |
2100-014X |
| DOI: |
10.1051/epjconf/202328704008 |
| Popis: |
Optical metasurfaces allow the development of original and more and more complex optical functions. They are therefore facing a design and characterization problem. Indeed, they are more and more composed of complex patterns, with different types of antennas and non-periodic. This is why it is important to build libraries of nano-structures that can be used as building blocks to compose optical functions. Therefore, we propose a direct phase measurement metrology method for optical nanostructures. Using lateral shift interferometry, our technique allows to simultaneously characterize in amplitude and phase nano-antennas of all types, shapes and materials, and thus to experimentally establish a library of nano-antennas. Our method brings an additional tool in the design of nano-antennas, which completes the existing simulation tools, by allowing to test all types of nano-antennas. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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