Measurement accuracy analysis for microgeometry nanostandards with microinterferometer and stylus profilometer
| Autor: | Łukasz Ślusarski |
|---|---|
| Jazyk: | English<br />Polish |
| Rok vydání: | 2018 |
| Předmět: | |
| Zdroj: | Biuletyn Wojskowej Akademii Technicznej, Vol 67, Iss 4, Pp 139-147 (2018) |
| Druh dokumentu: | article |
| ISSN: | 1234-5865 |
| DOI: | 10.5604/01.3001.0012.8503 |
| Popis: | The goal of the work, described in this paper, was to examine and analyse measurement capabilities of GUM Length and Angle Department in measurements of step height/depth standards with the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurements were performed with microinterforometer and stylus profilometer. Keywords: nanometrology, depth/height standards, microinterferometry, contact profilometry. |
| Databáze: | Directory of Open Access Journals |
| Externí odkaz: |
|