Study on defects detection technique of precise optical element

Autor: Zz Mi, Cong C, Cheng Y, Hm Zhang
Jazyk: English<br />French
Rok vydání: 2018
Předmět:
Zdroj: E3S Web of Conferences, Vol 53, p 01037 (2018)
Druh dokumentu: article
ISSN: 2267-1242
DOI: 10.1051/e3sconf/20185301037
Popis: Aiming at the problems of low efficiency of traditional detection methods for surface defects of precision optical element and inconvenient detection for optical elements of different calibers, a adjustable optical element defects detecting device for large laser devices is designed. The key technical points of system composition, detection environment, illumination design and image stitching are expounded. According to the characteristics of surface defects of optical element, such as the difference of contour, gray scale, contrast and ambiguity, a classification method based on FCM is proposed. The experimental results show that the system can realize the automatic detection of surface defects, also it can effectively distinguishes micron-scale defects and has good defect recognition performance. The overall average recognition rate reached to 93.3%.
Databáze: Directory of Open Access Journals