| Autor: |
Gurpreet Singh Gill, Sanjay Kumar, Ravindra Mukhiya, Vinod Kumar Khanna |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
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| Zdroj: |
Applications of Modelling and Simulation, Vol 6, Pp 64-71 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2600-8084 |
| Popis: |
In this paper, Finite Element Method (FEM)-based design and simulation of circular capacitive micromachined ultrasonic transducer (CMUT) has been discussed. The FEM simulation of CMUT is accomplished by using MEMCAD tools CoventorWare® and COMSOLTM. The simulation has been performed for air-coupled CMUT devices in which the resonance frequency of the designed CMUT device is 3.9 MHz. Moreover, the simulation results for resonance frequency and pull-in voltage show good agreement with analytical calculations. Finally, a device layer transfer fabrication process flow is also proposed to develop the MEMS-based CMUT devices. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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