Laboratory-Based Nano-Computed Tomography and Examples of Its Application in the Field of Materials Research

Autor: Dominik Müller, Jonas Graetz, Andreas Balles, Simon Stier, Randolf Hanke, Christian Fella
Jazyk: angličtina
Rok vydání: 2021
Předmět:
Zdroj: Crystals, Vol 11, Iss 6, p 677 (2021)
Druh dokumentu: article
ISSN: 2073-4352
DOI: 10.3390/cryst11060677
Popis: In a comprehensive study, we demonstrate the performance and typical application scenarios for laboratory-based nano-computed tomography in materials research on various samples. Specifically, we focus on a projection magnification system with a nano focus source. The imaging resolution is quantified with common 2D test structures and validated in 3D applications by means of the Fourier Shell Correlation. As representative application examples from nowadays material research, we show metallization processes in multilayer integrated circuits, aging in lithium battery electrodes, and volumetric of metallic sub-micrometer fillers of composites. Thus, the laboratory system provides the unique possibility to image non-destructively structures in the range of 170–190 nanometers, even for high-density materials.
Databáze: Directory of Open Access Journals