Current tuned slotted Y‐branch laser for wafer thickness measurements with THz radiation
Autor: | N. Surkamp, A. Gerling, J. O'Gorman, M. Honsberg, S. Schmidtmann, U. Nandi, S. Preu, J. Sacher, C. Brenner, M. R. Hofmann |
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Jazyk: | angličtina |
Rok vydání: | 2021 |
Předmět: | |
Zdroj: | Electronics Letters, Vol 57, Iss 24, Pp 936-938 (2021) |
Druh dokumentu: | article |
ISSN: | 1350-911X 0013-5194 |
DOI: | 10.1049/ell2.12314 |
Popis: | Abstract A slotted Y‐branch laser diode that emits two spectral modes at a difference frequency of about 1 THz is investigated in the context of photonic based cw‐THz measurements. The beating frequency of the emitted laser light can be tuned by ±10.5 GHz around 1 THz by changing the applied laser current, which allows for potentially fast measurements. A second spectral window of ±6.5 GHz was found at 850 GHz. Pointwise scanning of the difference frequency is demonstrated with thickness determination of HRFZ‐Si wafer samples as a possible application scenario. |
Databáze: | Directory of Open Access Journals |
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