Dual-tube MEMS-based spectrophone for sub-ppb mid-IR photoacoustic gas detection

Autor: Stefano Dello Russo, Jacopo Pelini, Inaki Lopez Garcia, Maria Concetta Canino, Alberto Roncaglia, Pablo Cancio Pastor, Iacopo Galli, Paolo De Natale, Simone Borri, Mario Siciliani de Cumis
Jazyk: angličtina
Rok vydání: 2024
Předmět:
Zdroj: Photoacoustics, Vol 40, Iss , Pp 100644- (2024)
Druh dokumentu: article
ISSN: 2213-5979
DOI: 10.1016/j.pacs.2024.100644
Popis: Nowadays, the scientific community and industry are increasingly pressed to provide solutions for developing compact and highly-performing trace-gas sensors for several applications of crucial importance, such as environmental monitoring or medical diagnostics. In this context, this work describes a novel configuration, making use of a mid-IR spectrophone combining the compactness of a photo-acoustic setup, a non-conventional micro-electro-mechanical (MEMS) acousto-to-voltage transducer, and the sensitivity enhancement given by a cost-effective and easy-to-build dual-tube resonator configuration. In the optimal condition of sample pressure, the system developed in this work can achieve a minimum detection limit (MDL) equal to 0.34 ppb when averaging up to 10 s. Compared with previous literature of single-pass photoacoustic-based sensors for N2O, this corresponds to a significant improvement both for the achieved normalized noise equivalent absorption coefficient (NNEA) equal to 1.41 × 10−9 cm−1WHz−1/2, and for a Noise-Equivalent-Concentration (NEC) of 1 ppb obtained at 1 s of averaging time.
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