Influence of gettering on aluminum ohmic contact formation

Autor:	Litvinenko V. N., Baganov Ye. A., Vikulin І. M., Gorbachev V. E.
Jazyk:	English<br />Russian
Rok vydání:	2020
Předmět:	aluminum ohmic contact gettering varicap defects reverse current Electrical engineering. Electronics. Nuclear engineering TK1-9971
Zdroj:	Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, Iss 1-2, Pp 45-50 (2020)
Druh dokumentu:	article
ISSN:	2225-5818 2309-9992 84477458
DOI:	10.15222/TKEA2020.1-2.45
Popis:	The study considers the reasons and mechanisms of degradation of reverse characteristics of varicaps with aluminum-based ohmic contacts. The authors present and analyze the experimental results on how gettering affects the reverse current of varicaps, as well as possible mechanisms of such effect. Gettering was performed with a getter site created on the back side of the substrate before the epitaxial layer is deposited on the working side of the substrate. The article demonstrates that the proposed technology using gettering is rather effective in reducing the level of reverse currents and in increasing the yield of devices.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/580b91b844774582bd336ae61ece5bbb Zobrazit plný text záznamu View record in DOAJ