| Autor: |
Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone |
| Jazyk: |
angličtina |
| Rok vydání: |
2024 |
| Předmět: |
|
| Zdroj: |
Micro and Nano Engineering, Vol 23, Iss , Pp 100244- (2024) |
| Druh dokumentu: |
article |
| ISSN: |
2590-0072 |
| DOI: |
10.1016/j.mne.2024.100244 |
| Popis: |
A gold micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometer having Ti/Au multi-layered structures is a promising device to detect very weak accelerations, such as muscle sounds, because of the high mass density of Au. However, Au is a soft metal, which raises concerns about the structural stability of the Au-MEMS capacitive accelerometers for practical use. In this work, we clarify the key geometric parameters to enhance their long-term structural stability by conducting a long-term vibration test for a total of 240 Ti/Au multi-layered micro-cantilevers with different geometric parameters, such as the length, width, and thickness of the micro-cantilevers, and the number of Ti/Au multi-layered structures. The long-term structural stability is evaluated from the change in the tip height of the micro-cantilevers before and after the vibration tests. These tests demonstrate that the micro-cantilevers with a shorter length, larger thickness, and more Ti/Au multi-layered structures are found to show better long-term structural stability. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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