Diagnostics of micro- and nanostructure using the scanning probe microscopy

Autor:	Teodor Paweł Gotszalk, Paweł Janus, Andrzej Marek Marendziak, Piotr Czarnecki, Jacek Mikołaj Radojewski, Roman F. Szeloch, Piotr B. Grabiec, Ivo W. Rangelow
Jazyk:	angličtina
Rok vydání:	2005
Předmět:	scannig probe microscopy microsystem nanofabrication Telecommunication TK5101-6720 Information technology T58.5-58.64
Zdroj:	Journal of Telecommunications and Information Technology, Iss 1 (2005)
Druh dokumentu:	article
ISSN:	1509-4553 1899-8852
DOI:	10.26636/jtit.2005.1.293
Popis:	In this paper we summarize the results of our research concerning the diagnostics of micro- and nanostructure with scanning probe microscopy (SPM). We describe the experiments performed with one of the scanning probe microscopy techniques enabling also insulating surfaces to be investigated, i.e., atomic force microscopy (AFM). We present the results of topography measurements using both contact and non-contact AFM modes, investigations of the friction forces that appear between the microtip and the surface, and experiments connected with the thermal behaviour of integrated circuits, carried out with the local resolution of 20 nm.
Databáze:	Directory of Open Access Journals
Externí odkaz:	https://doaj.org/article/572b7720abfe4c8e916fb85bb6388fba Zobrazit plný text záznamu View record in DOAJ