| Autor: |
Charmaine Chia, Stefanie S. Jeffrey, Roger T. Howe |
| Jazyk: |
angličtina |
| Rok vydání: |
2019 |
| Předmět: |
|
| Zdroj: |
Micro and Nano Engineering, Vol 3, Iss , Pp 50-58 (2019) |
| Druh dokumentu: |
article |
| ISSN: |
2590-0072 |
| DOI: |
10.1016/j.mne.2019.04.002 |
| Popis: |
Ultra-smooth metal structures are increasingly important in nanoscale device applications, from photonics to molecular electronics and 2D material growth. We describe three methods for achieving ultra-smooth platinum: patterned template stripping, chemical mechanical polishing and giant grain growth. Specifically, we demonstrate 1) the first use of spin-on glass as an adhesive for the transfer of a patterned platinum film via template stripping, enabling the film to be exposed to harsher solvents and at higher temperatures; 2) an updated CMP process for platinum with slurry materials that are currently available; 3) a giant grain growth process on a 4″ quartz substrate that uses a thinner Pt film than previously reported. Overall, root mean squared film roughness was decreased from ~14 Å for as-deposited platinum to |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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