Optimization of Surface Acoustic Wave-Based Rate Sensors

Autor: Fangqian Xu, Wen Wang, Xiuting Shao, Xinlu Liu, Yong Liang
Jazyk: angličtina
Rok vydání: 2015
Předmět:
Zdroj: Sensors, Vol 15, Iss 10, Pp 25761-25773 (2015)
Druh dokumentu: article
ISSN: 1424-8220
DOI: 10.3390/s151025761
Popis: The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line-oscillators and a metallic dot array deposited along the acoustic wave propagation path of the SAW delay lines. A significant improvement in sensor sensitivity was achieved in the case of 128° YX LiNbO3, and a thicker Au dot array, and low operation frequency were used to structure the sensor.
Databáze: Directory of Open Access Journals