Light Extraction Enhancement of InGaN Based Micro Light-Emitting Diodes with Concave-Convex Circular Composite Structure Sidewall

Autor: Lijun Tan, Quanbin Zhou, Wenlong Hu, Hong Wang, Ruohe Yao
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: Applied Sciences, Vol 9, Iss 17, p 3458 (2019)
Druh dokumentu: article
ISSN: 2076-3417
DOI: 10.3390/app9173458
Popis: We demonstrate that the concave-convex circular composite structure sidewall prepared by inductively coupled plasma (ICP) etching is an effective approach to increase the light efficiency without deteriorating the electrical characteristics for micro light-emitting diodes (LEDs). The saturated light output power of the device using the concave-convex circular composite structure sidewalls with a radius of 2 μm is 39.75 mW, an improvement of 7.2% compared with that of the device using flat sidewalls. The enhanced light output characteristics are primarily attributed to the increased photon emitting due by decreasing the total internal reflection without losing the active region area.
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