| Autor: |
Andrey Shkabko, Chencheng Xu, Paul Meuffels, Felix Gunkel, Regina Dittmann, Anke Weidenkaff, Rainer Waser |
| Jazyk: |
angličtina |
| Rok vydání: |
2013 |
| Předmět: |
|
| Zdroj: |
APL Materials, Vol 1, Iss 5, Pp 052111-052111-9 (2013) |
| Druh dokumentu: |
article |
| ISSN: |
2166-532X |
| DOI: |
10.1063/1.4831856 |
| Popis: |
Eu1−xLaxTiO3−δ (x = 0, 0.3, 0.5) films were deposited in a p(Ar(96%)/H2(4%)) = 4 × 10−4 mbar atmosphere on (LaAlO3)0.3-(Sr2AlTaO6)0.7 vicinal substrates (0.1°). Reflection high-energy electron diffraction oscillation characteristics of a layer-by-layer growth mode were observed for stoichiometric and Ti-rich films and the laser fluence suited to deposit stoichiometric films was identified to be 1.25 J/cm2 independent of the La content. The variety of resulting film compositions follows the general trend of Eu-enrichment for low laser and Ti-enrichment for high laser fluence. X-ray diffraction confirms that all the films are compressively strained with a general trend of an increase of c-axis elongation for non-stoichiometric films. The surfaces of non-stoichiometric films have an increased roughness, the highest sheet resistances, exhibit the presence of islands, and are Eu3+ rich for films deposited at low laser fluence. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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