Analysis of residual errors during computer controlled polishing

Autor: Killinger Simon, Haberl Alexander, Rascher Rolf
Jazyk: angličtina
Rok vydání: 2019
Předmět:
Zdroj: EPJ Web of Conferences, Vol 215, p 07001 (2019)
Druh dokumentu: article
ISSN: 2100-014X
20192150
DOI: 10.1051/epjconf/201921507001
Popis: In computer controlled subapertur polishing the formation of mid spatial frequency errors (MSFE) needs special attention. In this work the formation of MSFE in feed direction is investigated using the ADAPT tool from Satisloh.
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