High-resistivity p-type silicon-based p-i-n photodiode with high responsivity at the wavelength of 1060 nm

Autor: Kukurudziak M. S., Andreeva O. P., Lipka V. M.
Jazyk: English<br />Russian
Rok vydání: 2020
Předmět:
Zdroj: Tekhnologiya i Konstruirovanie v Elektronnoi Apparature, Iss 5-6, Pp 16-19 (2020)
Druh dokumentu: article
ISSN: 2225-5818
2309-9992
10667415
DOI: 10.15222/TKEA2020.5-6.16
Popis: The paper presents the results of development, optimization and improvement of p–i–n photodiode technology based on high-resistance p-type silicon with increased responsivity at a wavelength of 1060 nm. The optimal material was selected and the technological modes optimal for solving the set task were established and worked out іn the course of research.
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